Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8070911 | Capacitive coupling plasma processing apparatus | Shinji Himori | 2011-12-06 |
| 7952717 | Temperature measuring apparatus and temperature measuring method | Jun Abe, Chishio Koshimizu | 2011-05-31 |