Issued Patents 2011
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084375 | Hot edge ring with sloped upper surface | Sathya Mani, Gautam Bhattacharyya, Gregory R. Bettencourt, Sandy Chao | 2011-12-27 |
| 8080126 | Plasma processing apparatus | Keizo Hirose | 2011-12-20 |
| 8048327 | Plasma processing apparatus and control method thereof | Masatoshi Kitano | 2011-11-01 |
| 8008596 | Plasma processing apparatus and electrode used therein | Takashi Suzuki | 2011-08-30 |
| 7993489 | Capacitive coupling plasma processing apparatus and method for using the same | Naoki Matsumoto, Chishio Koshimizu | 2011-08-09 |
| 7988816 | Plasma processing apparatus and method | Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu, Ryuji Ohtani +11 more | 2011-08-02 |
| 7988814 | Plasma processing apparatus, plasma processing method, focus ring, and focus ring component | — | 2011-08-02 |
| 7951262 | Plasma processing apparatus and method | Masaru Sugimoto, Kunihiko Hinata, Noriyuki Kobayashi, Chishio Koshimizu, Ryuji Ohtani +10 more | 2011-05-31 |
| 7882800 | Ring mechanism, and plasma processing device using the ring mechanism | Mitsuru Hashimoto, Hideaki Tanaka, Shigeru Tahara, Kunihiko Hinata, Jun Ooyabu | 2011-02-08 |