Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7882800 | Ring mechanism, and plasma processing device using the ring mechanism | Akira Koshiishi, Hideaki Tanaka, Shigeru Tahara, Kunihiko Hinata, Jun Ooyabu | 2011-02-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7882800 | Ring mechanism, and plasma processing device using the ring mechanism | Akira Koshiishi, Hideaki Tanaka, Shigeru Tahara, Kunihiko Hinata, Jun Ooyabu | 2011-02-08 |