MM

Masaaki Miyagawa

TL Tokyo Electron Limited: 1 patents #261 of 712Top 40%
📍 Rifu, JP: #95 of 259 inventorsTop 40%
Overall (2011): #224,267 of 364,097Top 65%
1
Patents 2011

Issued Patents 2011

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
8043472 Substrate processing apparatus and focus ring Eiichi Nishimura 2011-10-25