Issued Patents 2011
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075698 | Substrate processing unit, method of detecting end point of cleaning of substrate processing unit, and method of detecting end point of substrate processing | Hiroshi Kannan, Yasuhiko Kojima, Yasuhiro Oshima, Takashi Shigeoka | 2011-12-13 |
| 8058728 | Diffusion barrier and adhesion layer for an interconnect structure | Shigeru Mizuno | 2011-11-15 |
| 8034406 | Integrated substrate processing in a vacuum processing tool | Masamichi Hara, Yasushi Mizusawa | 2011-10-11 |
| 8026168 | Semiconductor device containing an aluminum tantalum carbonitride barrier film and method of forming | Shigeru Mizuno | 2011-09-27 |
| 7989353 | Method for in-situ refurbishing a ceramic substrate holder | Kentaro Asakura, Masanao Ando, Toshio Hasegawa | 2011-08-02 |
| 7977235 | Method for manufacturing a semiconductor device with metal-containing cap layers | — | 2011-07-12 |
| 7959985 | Method of integrating PEALD Ta-containing films into Cu metallization | Tsukasa Matsuda, Masamichi Hara, Jacques Faguet, Yasushi Mizusawa | 2011-06-14 |
| 7884012 | Void-free copper filling of recessed features for semiconductor devices | Kenji Suzuki, Miho Jomen, Jonathan Rullan | 2011-02-08 |