Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8034406 | Integrated substrate processing in a vacuum processing tool | Tadahiro Ishizaka, Yasushi Mizusawa | 2011-10-11 |
| 7959985 | Method of integrating PEALD Ta-containing films into Cu metallization | Tadahiro Ishizaka, Tsukasa Matsuda, Jacques Faguet, Yasushi Mizusawa | 2011-06-14 |