Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8043871 | Method for forming oxide film on silicon wafer | Tsuyoshi Ohtsuki, Satoshi Tobe | 2011-10-25 |
| 8034406 | Integrated substrate processing in a vacuum processing tool | Tadahiro Ishizaka, Masamichi Hara | 2011-10-11 |
| 8029873 | Film deposition method and film deposition apparatus of metal film | Taro Ikeda, Tatsuo Hatano, Osamu Yokoyama, Takashi Sakuma | 2011-10-04 |
| 8026176 | Film forming method, plasma film forming apparatus and storage medium | Takashi Sakuma, Taro Ikeda, Osamu Yokoyama, Tsukasa Matsuda, Tatsuo Hatano | 2011-09-27 |
| 7959985 | Method of integrating PEALD Ta-containing films into Cu metallization | Tadahiro Ishizaka, Tsukasa Matsuda, Masamichi Hara, Jacques Faguet | 2011-06-14 |
| 7935393 | Method and system for improving sidewall coverage in a deposition system | Shigeru Mizuno, Takashi Sakuma | 2011-05-03 |