Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8029873 | Film deposition method and film deposition apparatus of metal film | Taro Ikeda, Yasushi Mizusawa, Osamu Yokoyama, Takashi Sakuma | 2011-10-04 |
| 8026176 | Film forming method, plasma film forming apparatus and storage medium | Takashi Sakuma, Taro Ikeda, Osamu Yokoyama, Tsukasa Matsuda, Yasushi Mizusawa | 2011-09-27 |
| 7879399 | CV method using metal carbonyl gas | Hideaki Yamasaki | 2011-02-01 |