Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8029873 | Film deposition method and film deposition apparatus of metal film | Taro Ikeda, Yasushi Mizusawa, Tatsuo Hatano, Osamu Yokoyama | 2011-10-04 |
| 8026176 | Film forming method, plasma film forming apparatus and storage medium | Taro Ikeda, Osamu Yokoyama, Tsukasa Matsuda, Tatsuo Hatano, Yasushi Mizusawa | 2011-09-27 |
| 7968414 | Semiconductor device and production method thereof | Hiroyuki Ohta, Yosuke Shimamune, Akiyoshi Hatada, Akira Katakami, Naoyoshi Tamura | 2011-06-28 |
| 7964464 | Semiconductor device and method of manufacturing the same | — | 2011-06-21 |
| 7935393 | Method and system for improving sidewall coverage in a deposition system | Shigeru Mizuno, Yasushi Mizusawa | 2011-05-03 |
| 7889217 | Display control apparatus and method, recording medium, and program | Masanori Nomura, Hiroshi Nagatani, Haruhiko Sakata, Hiroyuki Yoshida, Hirooki Tajima | 2011-02-15 |