Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8029621 | Raw material feeding device, film formation system and method for feeding gaseous raw material | Yumiko Kawano | 2011-10-04 |
| 7960278 | Method of film deposition | Yumiko Kawano | 2011-06-14 |
| 7879399 | CV method using metal carbonyl gas | Tatsuo Hatano | 2011-02-01 |