Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8029621 | Raw material feeding device, film formation system and method for feeding gaseous raw material | Hideaki Yamasaki | 2011-10-04 |
| 7960278 | Method of film deposition | Hideaki Yamasaki | 2011-06-14 |