Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075698 | Substrate processing unit, method of detecting end point of cleaning of substrate processing unit, and method of detecting end point of substrate processing | Hiroshi Kannan, Tadahiro Ishizaka, Yasuhiko Kojima, Takashi Shigeoka | 2011-12-13 |
| 7867922 | Film forming method for dielectric film | Shinji Ide, Yusaku Kashiwagi | 2011-01-11 |