Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8075698 | Substrate processing unit, method of detecting end point of cleaning of substrate processing unit, and method of detecting end point of substrate processing | Tadahiro Ishizaka, Yasuhiko Kojima, Yasuhiro Oshima, Takashi Shigeoka | 2011-12-13 |