Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7989353 | Method for in-situ refurbishing a ceramic substrate holder | Tadahiro Ishizaka, Kentaro Asakura, Toshio Hasegawa | 2011-08-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7989353 | Method for in-situ refurbishing a ceramic substrate holder | Tadahiro Ishizaka, Kentaro Asakura, Toshio Hasegawa | 2011-08-02 |