Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979518 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, Katherina Babich, S. Jay Chey, Robert N. Lang, Arpan Mahorowala +1 more | 2005-12-27 |
| 6950183 | Apparatus and method for inspection of photolithographic mask | Timothy A. Brunner, Christopher J. Progler | 2005-09-27 |
| 6887126 | Wafer thickness control during backside grind | Donald W. Brouillette, Thomas G. Ference, Harold G. Linde, Ronald L. Mendelson | 2005-05-03 |
| 6858357 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, Katherina Babich, Cameron Brooks, S. Jay Chey, C. Richard Guarnieri +1 more | 2005-02-22 |