Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6950183 | Apparatus and method for inspection of photolithographic mask | Timothy A. Brunner, Michael S. Hibbs | 2005-09-27 |
| 6933084 | Alternating aperture phase shift photomask having light absorption layer | — | 2005-08-23 |
| 6919146 | Planar reticle design/fabrication method for rapid inspection and cleaning | Daniel A. Corliss, Nakgeuon Seong | 2005-07-19 |
| 6869739 | Integrated lithographic print and detection model for optical CD | Christopher P. Ausschnitt, Ronald Gordon, Alan E. Rosenbluth | 2005-03-22 |