Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6919146 | Planar reticle design/fabrication method for rapid inspection and cleaning | Daniel A. Corliss, Christopher J. Progler | 2005-07-19 |
| 6842237 | Phase shifted test pattern for monitoring focus and aberrations in optical projection systems | Christopher P. Ausschnitt, Timothy A. Brunner, Joseph P. Kirk | 2005-01-11 |