Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6950183 | Apparatus and method for inspection of photolithographic mask | Michael S. Hibbs, Christopher J. Progler | 2005-09-27 |
| 6879400 | Single tone process window metrology target and method for lithographic processing | Christopher P. Ausschnitt | 2005-04-12 |
| 6842237 | Phase shifted test pattern for monitoring focus and aberrations in optical projection systems | Christopher P. Ausschnitt, Joseph P. Kirk, Nakgeuon Seong | 2005-01-11 |