Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6975398 | Method for determining semiconductor overlay on groundrule devices | William A. Muth | 2005-12-13 |
| 6937337 | Overlay target and measurement method using reference and sub-grids | Jaime D. Morillo | 2005-08-30 |
| 6879400 | Single tone process window metrology target and method for lithographic processing | Timothy A. Brunner | 2005-04-12 |
| 6869739 | Integrated lithographic print and detection model for optical CD | Ronald Gordon, Christopher J. Progler, Alan E. Rosenbluth | 2005-03-22 |
| 6842237 | Phase shifted test pattern for monitoring focus and aberrations in optical projection systems | Timothy A. Brunner, Joseph P. Kirk, Nakgeuon Seong | 2005-01-11 |