Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6964032 | Pitch-based subresolution assist feature design | Lars Liebmann, Allen H. Gabor, Carlos A. Fonseca, Martin Burkhardt | 2005-11-08 |
| 6869739 | Integrated lithographic print and detection model for optical CD | Christopher P. Ausschnitt, Christopher J. Progler, Alan E. Rosenbluth | 2005-03-22 |