Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6964032 | Pitch-based subresolution assist feature design | Lars Liebmann, Allen H. Gabor, Ronald Gordon, Carlos A. Fonseca | 2005-11-08 |
| 6940583 | Method and apparatus for amplitude filtering in the frequency plane of a lithographic projection system | Shahid Butt | 2005-09-06 |