Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6940583 | Method and apparatus for amplitude filtering in the frequency plane of a lithographic projection system | Martin Burkhardt | 2005-09-06 |
| 6842222 | Method of reducing pitch on semiconductor wafer | Gerhard Kunkel, Alan C. Thomas, Juergen Preuninger | 2005-01-11 |