Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979518 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, Katherina Babich, Michael S. Hibbs, Robert N. Lang, Arpan Mahorowala +1 more | 2005-12-27 |
| 6928380 | Thermal measurements of electronic devices during operation | Hendrik F. Hamann, James A. Lacey, James Vichiconti, Robert J. von Gutfeld | 2005-08-09 |
| 6858357 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, Katherina Babich, Cameron Brooks, C. Richard Guarnieri, Michael S. Hibbs +1 more | 2005-02-22 |