Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6919275 | Method of preventing diffusion of copper through a tantalum-comprising barrier layer | Tony P. Chiang, Gongda Yao, Peijun Ding, Fusen Chen, Barry Chin +2 more | 2005-07-19 |
| 6887786 | Method and apparatus for forming a barrier layer on a substrate | Xianmin Tang, Praburam Gopalraja, John C. Forster, Jick Yu | 2005-05-03 |