Issued Patents 2005
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6970757 | Method and apparatus for updating control state variables of a process control model based on rework data | Joyce S. Oey Hewett, Anthony J. Toprac, Christopher A. Bode, Alexander J. Pasadyn, Anastasia Oshelski Peterson +1 more | 2005-11-29 |
| 6961636 | Method and apparatus for dynamically monitoring controller tuning parameters | Robert J. Chong, Alexander J. Pasadyn | 2005-11-01 |
| 6937914 | Method and apparatus for controlling process target values based on manufacturing metrics | Christopher A. Bode, Alexander J. Pasadyn, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more | 2005-08-30 |
| 6925347 | Process control based on an estimated process result | Michael L. Miller, Alexander J. Pasadyn, Richard J. Markle, Brian K. Cusson, Patrick M. Cowan +2 more | 2005-08-02 |
| 6917849 | Method and apparatus for predicting electrical parameters using measured and predicted fabrication parameters | Alexander J. Pasadyn | 2005-07-12 |
| 6901340 | Method and apparatus for distinguishing between sources of process variation | Alexander J. Pasadyn, Joyce S. Oey Hewett, Christopher A. Bode, Anthony J. Toprac, Anastasia Oshelski Peterson +1 more | 2005-05-31 |
| 6850322 | Method and apparatus for controlling wafer thickness uniformity in a multi-zone vertical furnace | William J. Campbell, Scott Bushman, Elfido Coss, Jr. | 2005-02-01 |