Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960774 | Fault detection and control methodologies for ion implantation processes, and system for performing same | Elfido Coss, Jr., Richard J. Markle, Tom Tse | 2005-11-01 |
| 6925347 | Process control based on an estimated process result | Michael L. Miller, Thomas J. Sonderman, Alexander J. Pasadyn, Richard J. Markle, Brian K. Cusson +2 more | 2005-08-02 |