Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6960774 | Fault detection and control methodologies for ion implantation processes, and system for performing same | Elfido Coss, Jr., Patrick M. Cowan, Tom Tse | 2005-11-01 |
| 6925347 | Process control based on an estimated process result | Michael L. Miller, Thomas J. Sonderman, Alexander J. Pasadyn, Brian K. Cusson, Patrick M. Cowan +2 more | 2005-08-02 |
| 6907369 | Method and apparatus for modifying design constraints based on observed performance | Robert J. Chong, Alexander J. Pasadyn | 2005-06-14 |
| 6875622 | Method and apparatus for determining electromagnetic properties of a process layer using scatterometry measurements | — | 2005-04-05 |