Issued Patents 2005
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6978189 | Matching data related to multiple metrology tools | Christopher A. Bode, Matthew A. Purdy | 2005-12-20 |
| 6970757 | Method and apparatus for updating control state variables of a process control model based on rework data | Joyce S. Oey Hewett, Anthony J. Toprac, Christopher A. Bode, Anastasia Oshelski Peterson, Thomas J. Sonderman +1 more | 2005-11-29 |
| 6969672 | Method and apparatus for controlling a thickness of a conductive layer in a semiconductor manufacturing operation | Joyce S. Oey Hewett | 2005-11-29 |
| 6968252 | Method and apparatus for dispatching based on metrology tool performance | James Broc Stirton | 2005-11-22 |
| 6961636 | Method and apparatus for dynamically monitoring controller tuning parameters | Robert J. Chong, Thomas J. Sonderman | 2005-11-01 |
| 6947803 | Dispatch and/or disposition of material based upon an expected parameter result | Christopher A. Bode | 2005-09-20 |
| 6937914 | Method and apparatus for controlling process target values based on manufacturing metrics | Christopher A. Bode, Thomas J. Sonderman, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more | 2005-08-30 |
| 6925347 | Process control based on an estimated process result | Michael L. Miller, Thomas J. Sonderman, Richard J. Markle, Brian K. Cusson, Patrick M. Cowan +2 more | 2005-08-02 |
| 6917849 | Method and apparatus for predicting electrical parameters using measured and predicted fabrication parameters | Thomas J. Sonderman | 2005-07-12 |
| 6912433 | Determining a next tool state based on fault detection information | Robert J. Chong, Michael L. Miller, Eric O. Green | 2005-06-28 |
| 6907369 | Method and apparatus for modifying design constraints based on observed performance | Richard J. Markle, Robert J. Chong | 2005-06-14 |
| 6901340 | Method and apparatus for distinguishing between sources of process variation | Joyce S. Oey Hewett, Christopher A. Bode, Anthony J. Toprac, Anastasia Oshelski Peterson, Thomas J. Sonderman +1 more | 2005-05-31 |
| 6897075 | Method and apparatus for controlling photolithography overlay registration incorporating feedforward overlay information | Christopher A. Bode | 2005-05-24 |