Issued Patents 2005
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6978189 | Matching data related to multiple metrology tools | Matthew A. Purdy, Alexander J. Pasadyn | 2005-12-20 |
| 6970757 | Method and apparatus for updating control state variables of a process control model based on rework data | Joyce S. Oey Hewett, Anthony J. Toprac, Alexander J. Pasadyn, Anastasia Oshelski Peterson, Thomas J. Sonderman +1 more | 2005-11-29 |
| 6957120 | Multi-level process data representation | Michael L. Miller | 2005-10-18 |
| 6947803 | Dispatch and/or disposition of material based upon an expected parameter result | Alexander J. Pasadyn | 2005-09-20 |
| 6937914 | Method and apparatus for controlling process target values based on manufacturing metrics | Thomas J. Sonderman, Alexander J. Pasadyn, Anthony J. Toprac, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more | 2005-08-30 |
| 6912436 | Prioritizing an application of correction in a multi-input control system | Gary Jones, Richard D. Edwards, Matthew A. Purdy | 2005-06-28 |
| 6901340 | Method and apparatus for distinguishing between sources of process variation | Alexander J. Pasadyn, Joyce S. Oey Hewett, Anthony J. Toprac, Anastasia Oshelski Peterson, Thomas J. Sonderman +1 more | 2005-05-31 |
| 6897075 | Method and apparatus for controlling photolithography overlay registration incorporating feedforward overlay information | Alexander J. Pasadyn | 2005-05-24 |
| 6871114 | Updating process controller based upon fault detection analysis | Eric O. Green, Matthew A. Purdy, Elfido Coss, Jr., Robert J. Chong, Gregory A. Cherry | 2005-03-22 |