Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6978189 | Matching data related to multiple metrology tools | Christopher A. Bode, Alexander J. Pasadyn | 2005-12-20 |
| 6967068 | Method of controlling stepper process parameters based upon optical properties of incoming anti-reflecting coating layers, and system for accomplishing same | Joyce S. Oey Hewett | 2005-11-22 |
| 6912436 | Prioritizing an application of correction in a multi-input control system | Gary Jones, Christopher A. Bode, Richard D. Edwards | 2005-06-28 |
| 6871114 | Updating process controller based upon fault detection analysis | Eric O. Green, Elfido Coss, Jr., Christopher A. Bode, Robert J. Chong, Gregory A. Cherry | 2005-03-22 |