Issued Patents 2005
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6968303 | Automated system for extracting and combining tool trace data and wafer electrical test (WET) data for semiconductor processing | Qingsu Wang | 2005-11-22 |
| 6960774 | Fault detection and control methodologies for ion implantation processes, and system for performing same | Patrick M. Cowan, Richard J. Markle, Tom Tse | 2005-11-01 |
| 6954883 | Method and apparatus for performing fault detection using data from a database | Michael R. Conboy, Susan Hickey | 2005-10-11 |
| 6928333 | Scheduling method for automated work-cell transfer system | Michael R. Conboy, Patrick J. Ryan | 2005-08-09 |
| 6905895 | Predicting process excursions based upon tool state variables | Mark K. Sze-To | 2005-06-14 |
| 6871114 | Updating process controller based upon fault detection analysis | Eric O. Green, Matthew A. Purdy, Christopher A. Bode, Robert J. Chong, Gregory A. Cherry | 2005-03-22 |
| 6871112 | Method for requesting trace data reports from FDC semiconductor fabrication processes | Michael R. Conboy, Bryce A. Hendrix | 2005-03-22 |
| 6868512 | Fault detection system with real-time database | Michael L. Miller | 2005-03-15 |
| 6850322 | Method and apparatus for controlling wafer thickness uniformity in a multi-zone vertical furnace | William J. Campbell, Scott Bushman, Thomas J. Sonderman | 2005-02-01 |