Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6970757 | Method and apparatus for updating control state variables of a process control model based on rework data | Joyce S. Oey Hewett, Christopher A. Bode, Alexander J. Pasadyn, Anastasia Oshelski Peterson, Thomas J. Sonderman +1 more | 2005-11-29 |
| 6937914 | Method and apparatus for controlling process target values based on manufacturing metrics | Christopher A. Bode, Thomas J. Sonderman, Alexander J. Pasadyn, Joyce S. Oey Hewett, Anastasia Oshelski Peterson +1 more | 2005-08-30 |
| 6901340 | Method and apparatus for distinguishing between sources of process variation | Alexander J. Pasadyn, Joyce S. Oey Hewett, Christopher A. Bode, Anastasia Oshelski Peterson, Thomas J. Sonderman +1 more | 2005-05-31 |
| 6884147 | Method for chemical-mechanical polish control in semiconductor manufacturing | — | 2005-04-26 |