Issued Patents 2005
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6980300 | Method and apparatus for generating a polishing process endpoint signal using scatterometry | Kevin R. Lensing | 2005-12-27 |
| 6972853 | Methods of calibrating and controlling stepper exposure processes and tools, and system for accomplishing same | Homi E. Nariman | 2005-12-06 |
| 6968252 | Method and apparatus for dispatching based on metrology tool performance | Alexander J. Pasadyn | 2005-11-22 |
| 6933158 | Method of monitoring anneal processes using scatterometry, and system for performing same | Kevin R. Lensing, Homi E. Nariman, Steven P. Reeves | 2005-08-23 |
| 6927080 | Structures for analyzing electromigration, and methods of using same | Homi E. Nariman, Kevin R. Lensing, Steven P. Reeves | 2005-08-09 |
| 6881594 | Method of using scatterometry for analysis of electromigration, and structures for performing same | Steven P. Reeves, Homi E. Nariman, Kevin R. Lensing | 2005-04-19 |
| 6859746 | Methods of using adaptive sampling techniques based upon categorization of process variations, and system for performing same | — | 2005-02-22 |