Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6980300 | Method and apparatus for generating a polishing process endpoint signal using scatterometry | James Broc Stirton | 2005-12-27 |
| 6933158 | Method of monitoring anneal processes using scatterometry, and system for performing same | James Broc Stirton, Homi E. Nariman, Steven P. Reeves | 2005-08-23 |
| 6927080 | Structures for analyzing electromigration, and methods of using same | Homi E. Nariman, James Broc Stirton, Steven P. Reeves | 2005-08-09 |
| 6881594 | Method of using scatterometry for analysis of electromigration, and structures for performing same | James Broc Stirton, Steven P. Reeves, Homi E. Nariman | 2005-04-19 |