Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6972853 | Methods of calibrating and controlling stepper exposure processes and tools, and system for accomplishing same | James Broc Stirton | 2005-12-06 |
| 6933158 | Method of monitoring anneal processes using scatterometry, and system for performing same | Kevin R. Lensing, James Broc Stirton, Steven P. Reeves | 2005-08-23 |
| 6927080 | Structures for analyzing electromigration, and methods of using same | James Broc Stirton, Kevin R. Lensing, Steven P. Reeves | 2005-08-09 |
| 6881594 | Method of using scatterometry for analysis of electromigration, and structures for performing same | James Broc Stirton, Steven P. Reeves, Kevin R. Lensing | 2005-04-19 |