Issued Patents 2004
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833310 | Semiconductor device having thin film formed by atomic layer deposition and method for fabricating the same | Yeong-kwan Kim, Dong Chan Kim, Seung Hwan Lee | 2004-12-21 |
| 6828616 | Integrated circuit devices that utilize doped Poly-Si1−xGex conductive plugs as interconnects | Sang-jeong Oh, Yeong-kwan Kim, Seung Hwan Lee, Dong Chan Kim | 2004-12-07 |
| 6828218 | Method of forming a thin film using atomic layer deposition | Yeong-kwan Kim, Seung Hwan Lee | 2004-12-07 |
| 6806183 | Methods for forming capacitors on semiconductor substrates | Chang-Seok Kang, Doo-sup Hwang, Cha-young Yoo, Hong-Bae Park | 2004-10-19 |
| 6800570 | Method of forming a metal oxide film | Han-Mei Choi, Sung Tae Kim, Young Sun Kim, Ki-Chul Kim, In Sung Park | 2004-10-05 |
| 6794263 | Method of manufacturing a semiconductor device including alignment mark | Kong-Soo Lee, Jae-Jong Han, Gi Hyun Hwang, Kyoung-Seok Kim, Sung-Eui Kim +1 more | 2004-09-21 |
| 6720275 | Methods of fabricating capacitors including Ta2O5 layers in a chamber including changing a Ta2O5 layer to heater separation or chamber pressure | Ki-Yeon Park, Heung-Soo Park | 2004-04-13 |
| 6700153 | One-cylinder stack capacitor and method for fabricating the same | Jung-Hwan Oh, Ki-Hyun Hwang, Jae Young Park, In-Seak Hwang | 2004-03-02 |
| 6693032 | Method of forming a contact structure having an anchoring portion | Bong-young Yoo, Dae-hong Ko, Nae-In Lee | 2004-02-17 |
| 6680251 | Methods of chemical vapor depositing ruthenium by varying chemical vapor deposition parameters | Seok-Jun Won, Cha-young Yoo, Sung Tae Kim, Yun-Jung Lee, Soon-yeon Park | 2004-01-20 |
| 6680511 | Integrated circuit devices providing improved short prevention | Hyoung Joon Kim, Byeong-yun Nam | 2004-01-20 |