Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6750092 | Methods of forming ruthenium film by changing process conditions during chemical vapor deposition and ruthenium films formed thereby | Cha-young Yoo | 2004-06-15 |
| 6692795 | Method for fabricating semiconductor device having ruthenium layer and equipment for fabricating the same | Soon-yeon Park, Cha-young Yoo | 2004-02-17 |
| 6680251 | Methods of chemical vapor depositing ruthenium by varying chemical vapor deposition parameters | Cha-young Yoo, Sung Tae Kim, Young-Wook Park, Yun-Jung Lee, Soon-yeon Park | 2004-01-20 |
| 6677217 | Methods for manufacturing integrated circuit metal-insulator-metal capacitors including hemispherical grain lumps | Jae Hyun Joo, Wan-don Kim, Soon-yeon Park | 2004-01-13 |