Issued Patents 2004
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815221 | Method for manufacturing capacitor of semiconductor memory device controlling thermal budget | Wan-don Kim, Doo-sup Hwang, Jae Hyun Joo, Eun-Ae Chung, Yong-Kuk Jeong | 2004-11-09 |
| 6806183 | Methods for forming capacitors on semiconductor substrates | Chang-Seok Kang, Doo-sup Hwang, Young-Wook Park, Hong-Bae Park | 2004-10-19 |
| 6806139 | Method of fabricating a MIM capacitor using etchback | Wan-don Kim, Jae Hyun Joo | 2004-10-19 |
| 6762091 | Methods for manufacturing semiconductor devices having a metal layer | Jae Hyun Joo, Wan-don Kim | 2004-07-13 |
| 6750092 | Methods of forming ruthenium film by changing process conditions during chemical vapor deposition and ruthenium films formed thereby | Seok-Jun Won | 2004-06-15 |
| 6743678 | Methods for manufacturing semiconductor memory devices | Kwang Hee Lee, Sung Tae Kim, Han-Jin Lim, Wan-don Kim, Se-hoon Oh | 2004-06-01 |
| 6692795 | Method for fabricating semiconductor device having ruthenium layer and equipment for fabricating the same | Seok-Jun Won, Soon-yeon Park | 2004-02-17 |
| 6683001 | Method for manufacturing a semiconductor device whereby degradation of surface morphology of a metal layer from thermal oxidation is suppressed | Eun-Ae Chung, Doo-sup Hwang | 2004-01-27 |
| 6680251 | Methods of chemical vapor depositing ruthenium by varying chemical vapor deposition parameters | Seok-Jun Won, Sung Tae Kim, Young-Wook Park, Yun-Jung Lee, Soon-yeon Park | 2004-01-20 |