Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6692795 | Method for fabricating semiconductor device having ruthenium layer and equipment for fabricating the same | Seok-Jun Won, Cha-young Yoo | 2004-02-17 |
| 6680251 | Methods of chemical vapor depositing ruthenium by varying chemical vapor deposition parameters | Seok-Jun Won, Cha-young Yoo, Sung Tae Kim, Young-Wook Park, Yun-Jung Lee | 2004-01-20 |
| 6677217 | Methods for manufacturing integrated circuit metal-insulator-metal capacitors including hemispherical grain lumps | Jae Hyun Joo, Wan-don Kim, Seok-Jun Won | 2004-01-13 |