Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828254 | Plasma enhanced chemical vapor deposition apparatus and method for forming nitride layer using the same | Jae-Jong Han, Byung-Ho Ahn, Seung-Mok Shin, Hwa Sik Kim, Hong-Bae Park | 2004-12-07 |
| 6815370 | Plasma enhanced chemical vapor deposition apparatus and method for forming nitride layer using the same | Jae-Jong Han, Byung-Ho Ahn, Seung-Mok Shin, Hwa Sik Kim, Hong-Bae Park | 2004-11-09 |
| 6794263 | Method of manufacturing a semiconductor device including alignment mark | Kong-Soo Lee, Young-Wook Park, Jae-Jong Han, Gi Hyun Hwang, Sung-Eui Kim +1 more | 2004-09-21 |