Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828254 | Plasma enhanced chemical vapor deposition apparatus and method for forming nitride layer using the same | Jae-Jong Han, Kyoung-Seok Kim, Byung-Ho Ahn, Seung-Mok Shin, Hong-Bae Park | 2004-12-07 |
| 6815370 | Plasma enhanced chemical vapor deposition apparatus and method for forming nitride layer using the same | Jae-Jong Han, Kyoung-Seok Kim, Byung-Ho Ahn, Seung-Mok Shin, Hong-Bae Park | 2004-11-09 |