Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828254 | Plasma enhanced chemical vapor deposition apparatus and method for forming nitride layer using the same | Kyoung-Seok Kim, Byung-Ho Ahn, Seung-Mok Shin, Hwa Sik Kim, Hong-Bae Park | 2004-12-07 |
| 6815370 | Plasma enhanced chemical vapor deposition apparatus and method for forming nitride layer using the same | Kyoung-Seok Kim, Byung-Ho Ahn, Seung-Mok Shin, Hwa Sik Kim, Hong-Bae Park | 2004-11-09 |
| 6794263 | Method of manufacturing a semiconductor device including alignment mark | Kong-Soo Lee, Young-Wook Park, Gi Hyun Hwang, Kyoung-Seok Kim, Sung-Eui Kim +1 more | 2004-09-21 |
| 6730570 | Method for forming a self-aligned contact of a semiconductor device and method for manufacturing a semiconductor device using the same | Seung-Mok Shin, Ki-Hyun Hwang | 2004-05-04 |
| 6723662 | Methods of forming gate oxide films in integrated circuit devices using wet or dry oxidization processes with reduced chloride | Kong-Soo Lee, Sung-Eui Kim | 2004-04-20 |