Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833310 | Semiconductor device having thin film formed by atomic layer deposition and method for fabricating the same | Dong Chan Kim, Seung Hwan Lee, Young-Wook Park | 2004-12-21 |
| 6828218 | Method of forming a thin film using atomic layer deposition | Young-Wook Park, Seung Hwan Lee | 2004-12-07 |
| 6828616 | Integrated circuit devices that utilize doped Poly-Si1−xGex conductive plugs as interconnects | Sang-jeong Oh, Seung Hwan Lee, Dong Chan Kim, Young-Wook Park | 2004-12-07 |