Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833310 | Semiconductor device having thin film formed by atomic layer deposition and method for fabricating the same | Yeong-kwan Kim, Dong Chan Kim, Young-Wook Park | 2004-12-21 |
| 6828218 | Method of forming a thin film using atomic layer deposition | Yeong-kwan Kim, Young-Wook Park | 2004-12-07 |
| 6828616 | Integrated circuit devices that utilize doped Poly-Si1−xGex conductive plugs as interconnects | Sang-jeong Oh, Yeong-kwan Kim, Dong Chan Kim, Young-Wook Park | 2004-12-07 |