Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6720275 | Methods of fabricating capacitors including Ta2O5 layers in a chamber including changing a Ta2O5 layer to heater separation or chamber pressure | Heung-Soo Park, Young-Wook Park | 2004-04-13 |
| 6689696 | Method for manufacturing semiconductor device employing dielectric layer used to form conductive layer into three dimensional shape | Joo Won Lee | 2004-02-10 |