Issued Patents 2004
Showing 51–75 of 75 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6734051 | Plasma enhanced chemical vapor deposition methods of forming titanium silicide comprising layers over a plurality of semiconductor substrates | Cem Basceri, Irina Vasilyeva, Ammar Derraa, Philip Campbell | 2004-05-11 |
| 6730367 | Atomic layer deposition method with point of use generated reactive gas species | — | 2004-05-04 |
| 6730355 | Chemical vapor deposition method of forming a material over at least two substrates | Ammar Derraa, Cem Basceri, Irina Vasilyeva, Philip Campbell | 2004-05-04 |
| 6727173 | Semiconductor processing methods of forming an utilizing antireflective material layers, and methods of forming transistor gate stacks | Sujit Sharan | 2004-04-27 |
| 6727190 | Method of forming fluorine doped boron-phosphorous silicate glass (F-BPSG) insulating materials | Anand Srinivasan, Ravi Iyer | 2004-04-27 |
| 6727140 | Capacitor with high dielectric constant materials and method of making | Cem Basceri, Sam Yang | 2004-04-27 |
| 6719012 | Method of forming trench isolation regions | Trung T. Doan | 2004-04-13 |
| 6720272 | Methods of forming capacitor constructions | Trung T. Doan | 2004-04-13 |
| 6713234 | Fabrication of semiconductor devices using anti-reflective coatings | Zhiping Yin | 2004-03-30 |
| 6705246 | RF powered plasma enhanced chemical vapor deposition reactor and methods of effecting plasma enhanced chemical vapor deposition | Sujit Sharan, Paul Smith, Mei Chang | 2004-03-16 |
| 6706116 | Method of forming a crystalline phase material | Sujit Sharan | 2004-03-16 |
| 6701066 | Delivery of solid chemical precursors | — | 2004-03-02 |
| 6696745 | Methods for use in forming a capacitor and structures resulting from same | Garo Derderian | 2004-02-24 |
| 6696716 | Structures and methods for enhancing capacitors in integrated ciruits | Cem Basceri | 2004-02-24 |
| 6689624 | Method of forming self-aligned, trenchless mangetoresitive random-access memory (MRAM) structure with sidewall containment of MRAM structure | Trung T. Doan, Roger Lee, Dennis Keller, Ren Earl | 2004-02-10 |
| 6689321 | Detection devices, methods and systems for gas phase materials | — | 2004-02-10 |
| 6682943 | Method for forming minimally spaced MRAM structures | D. Mark Durcan, Trung T. Doan, Roger Lee, Dennis Keller, Ren Earl | 2004-01-27 |
| 6683005 | Method of forming capacitor constructions | Trung T. Doan | 2004-01-27 |
| 6682972 | Methods of forming materials comprising tungsten and nitrogen | Vishnu K. Agarwal | 2004-01-27 |
| 6682969 | Top electrode in a strongly oxidizing environment | Cem Basceri, Howard E. Rhodes, F. Daniel Gealy, Thomas M. Graettinger | 2004-01-27 |
| 6677640 | Memory cell with tight coupling | Sukesh Sandhu, Dan Gealy | 2004-01-13 |
| 6673669 | Method of reducing oxygen vacancies and DRAM processing method | Cem Basceri | 2004-01-06 |
| 6674169 | Semiconductor device with titanium silicon oxide layer | Pierre C. Fazan | 2004-01-06 |
| 6673713 | Anti-reflective coatings and methods for forming and using same | Zhiping Yin | 2004-01-06 |
| 6673701 | Atomic layer deposition methods | Eugene P. Marsh, Brian A. Vaartstra, Paul Castrovillo, Cem Basceri, Garo Derderian | 2004-01-06 |