Issued Patents 2004
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6830983 | Method of making an oxygen diffusion barrier for semiconductor devices using platinum, rhodium, or iridium stuffed with silicon oxide | — | 2004-12-14 |
| 6813136 | Memory structure with an annealed film | — | 2004-11-02 |
| 6800937 | RuSixOy-containing adhesion layers and process for fabricating the same | Brenda D. Kraus | 2004-10-05 |
| 6800521 | Process for the formation of RuSixOy-containing barrier layers for high-k dielectrics | — | 2004-10-05 |
| 6796313 | Methods of cleaning vaporization surfaces | — | 2004-09-28 |
| 6787449 | Method for the formation of RuSixOy-containing barrier layers for high-k dielectrics | — | 2004-09-07 |
| 6783657 | Systems and methods for the electrolytic removal of metals from substrates | Stefan Uhlenbrock, Donald L. Westmoreland | 2004-08-31 |
| 6764895 | Process for fabricating RuSixOy-containing adhesion layers | Brenda D. Kraus | 2004-07-20 |
| 6757153 | Thin film structure that may be used with an adhesion layer | — | 2004-06-29 |
| 6744138 | RuSixOy-containing barrier layers for high-k dielectrics | — | 2004-06-01 |
| 6737317 | Method of manufacturing a capacitor having RuSixOy-containing adhesion layers | Brenda D. Kraus | 2004-05-18 |
| 6737313 | Surface treatment of an oxide layer to enhance adhesion of a ruthenium metal layer | Brenda D. Kraus | 2004-05-18 |
| 6713760 | Analysis of semiconductor surfaces by secondary ion mass spectrometry and methods | — | 2004-03-30 |
| 6690055 | Devices containing platinum-rhodium layers and methods | Stefan Uhlenbrock | 2004-02-10 |
| 6677252 | Methods for planarization of non-planar surfaces in device fabrication | — | 2004-01-13 |
| 6673701 | Atomic layer deposition methods | Brian A. Vaartstra, Paul Castrovillo, Cem Basceri, Garo Derderian, Gurtej S. Sandhu | 2004-01-06 |