Issued Patents 2004
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828256 | Methods for forming metal-containing films using metal complexes with chelating O- and/or N-donor ligands | — | 2004-12-07 |
| 6821341 | Precursor for use in preparing layers on substrates | — | 2004-11-23 |
| 6812990 | Method for making sol gel spacers for flat panel displays | James J. Hofmann, Brenda D. Kraus, Donald L. Westmoreland | 2004-11-02 |
| 6794284 | Systems and methods for forming refractory metal nitride layers using disilazanes | — | 2004-09-21 |
| 6786936 | Methods, complexes, and systems for forming metal-containing films on semiconductor structures | — | 2004-09-07 |
| 6784049 | Method for forming refractory metal oxide layers with tetramethyldisiloxane | — | 2004-08-31 |
| 6773495 | Solutions of metal-comprising materials | Stefan Uhlenbrock | 2004-08-10 |
| 6770426 | Supercritical compositions for removal of organic material and methods of using same | — | 2004-08-03 |
| 6730592 | Methods for planarization of metal-containing surfaces using halogens and halide salts | — | 2004-05-04 |
| 6730164 | Systems and methods for forming strontium- and/or barium-containing layers | Stefan Uhlenbrock | 2004-05-04 |
| 6730163 | Aluminum-containing material and atomic layer deposition methods | — | 2004-05-04 |
| 6716077 | Method of forming flow-fill structures | — | 2004-04-06 |
| 6682602 | Chemical vapor deposition systems including metal complexes with chelating O- and/or N-donor ligands | — | 2004-01-27 |
| 6673701 | Atomic layer deposition methods | Eugene P. Marsh, Paul Castrovillo, Cem Basceri, Garo Derderian, Gurtej S. Sandhu | 2004-01-06 |