Issued Patents 2004
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835980 | Semiconductor device with novel film composition | Gurtej S. Sandhu | 2004-12-28 |
| 6835664 | Methods of forming trenched isolation regions | Demetrius Sarigiannis, Cem Basceri | 2004-12-28 |
| 6833576 | Methods for forming and integrated circuit structures containing ruthenium and tungsten containing layers | Vishnu K. Agarwal, Gurtej S. Sandhu, Weimin Li, Mark Visokay, Cem Basceri +1 more | 2004-12-21 |
| 6821347 | Apparatus and method for depositing materials onto microelectronic workpieces | Craig M. Carpenter, Allen Mardian, Ross S. Dando, Kimberly Tschepen | 2004-11-23 |
| 6818249 | Reactors, systems with reaction chambers, and methods for depositing materials onto micro-device workpieces | — | 2004-11-16 |
| 6797337 | Method for delivering precursors | Ross S. Dando, Craig M. Carpenter, Allen Mardian, Dan Gealy | 2004-09-28 |
| 6787185 | Deposition methods for improved delivery of metastable species | Gurtej S. Sandhu | 2004-09-07 |
| 6787477 | Methods of forming dielectric layers and methods of forming capacitors | Gurtej S. Sandhu | 2004-09-07 |
| 6784504 | Methods for forming rough ruthenium-containing layers and structures/methods using same | Vishnu K. Agarwal | 2004-08-31 |
| 6780758 | Method of establishing electrical contact between a semiconductor substrate and a semiconductor device | Gurtej S. Sandhu | 2004-08-24 |
| 6780766 | Methods of forming regions of differing composition over a substrate | Cem Basceri | 2004-08-24 |
| 6777739 | Multilayer electrode for a ferroelectric capacitor | Vishnu K. Agarwal, F. Daniel Gealy | 2004-08-17 |
| 6767806 | METHOD OF FORMING A PATTERNED SUBSTANTIALLY CRYSTALLINE TA2O5 COMPRISING MATERIAL, AND METHOD OF FORMING A CAPACITOR HAVING A CAPACITOR DIELECTRIC REGION COMPRISING SUBSTANTIALLY CRYSTALLINE TA2O5 COMPRISING MATERIAL | Cem Basceri, Mark Visokay, John M. Drynan, Gurtej S. Sandhu | 2004-07-27 |
| 6753271 | Atomic layer deposition methods | Demetrius Sarigiannis, Cem Basceri, Gurtej S. Sandhu, F. Daniel Gealy, Chris M. Carlson | 2004-06-22 |
| 6750110 | Continuous good step coverage CVD platinum metal deposition | — | 2004-06-15 |
| 6746916 | Method for forming a multilayer electrode for a ferroelectric capacitor | Vishnu K. Agarwal, F. Daniel Gealy | 2004-06-08 |
| 6744093 | Multilayer electrode for a ferroelectric capacitor | Vishnu K. Agarwal, F. Daniel Gealy | 2004-06-01 |
| 6740597 | Methods of removing at least some of a material from a semiconductor substrate | Kevin J. Torek | 2004-05-25 |
| 6730559 | Capacitors and methods of forming capacitors | Vishnu K. Agarwal | 2004-05-04 |
| 6696745 | Methods for use in forming a capacitor and structures resulting from same | Gurtej S. Sandhu | 2004-02-24 |
| 6673701 | Atomic layer deposition methods | Eugene P. Marsh, Brian A. Vaartstra, Paul Castrovillo, Cem Basceri, Gurtej S. Sandhu | 2004-01-06 |