Issued Patents 2004
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821347 | Apparatus and method for depositing materials onto microelectronic workpieces | Allen Mardian, Ross S. Dando, Kimberly Tschepen, Garo Derderian | 2004-11-23 |
| 6814813 | Chemical vapor deposition apparatus | Ross S. Dando, Philip Campbell, Allen Mardian | 2004-11-09 |
| 6800172 | INTERFACIAL STRUCTURE FOR SEMICONDUCTOR SUBSTRATE PROCESSING CHAMBERS AND SUBSTRATE TRANSFER CHAMBERS AND FOR SEMICONDUCTOR SUBSTRATE PROCESSING CHAMBERS AND ACCESSORY ATTACHMENTS, AND SEMICONDUCTOR SUBSTRATE PROCESSOR | Ross S. Dando, Allen Mardian, Kevin Hamer, Raynald Cantin, Philip Campbell +2 more | 2004-10-05 |
| 6797337 | Method for delivering precursors | Ross S. Dando, Allen Mardian, Garo Derderian, Dan Gealy | 2004-09-28 |
| 6787373 | Method of replacing at least a portion of semiconductor substrate deposition process kit hardware, and method of depositing materials over a plurality of semiconductor substrates | Ross S. Dando, Philip Campbell, Allen Mardian, Gurtej S. Sandhu | 2004-09-07 |
| 6736708 | Microelectronic substrate assembly planarizing machines and methods of mechanical and chemical-mechanical planarization of microelectronic substrate assemblies | — | 2004-05-18 |
| 6677250 | CVD apparatuses and methods of forming a layer over a semiconductor substrate | Philip Campbell, Ross S. Dando, Kevin Hamer | 2004-01-13 |